Seminar
Tuesday, April 4, 2017 - 12:00am
Graduate student Xiang Ao will be presenting
"Micro/nano Fabrication Techniques of Fluidic Devices"
on April 4, 2017 at 4:10 PM in Neville Hall, Room 3.
Abstract:
Due to the growing research interests in nano and micro-scale structures in biochemistry, membrane and tissue engineering, micro and nano fluidic devices with high throughput and high resolution were in demand. Micro/nano fabrication, patterning and lithography techniques served as necessary components for this research area of interests. Different technologies for fabricating microfluidic devices with various materials will be explored in this seminar. The techniques that will be covered include an in-situ optical maskless stereolithography for making Poly(N-isopropylacrylamide) (PNI-PAAm) microvalve, a roll-typed liquid transfer imprint lithography (R-LTIL) for patterning on micro lens or flat Si wafer substrate. Moreover, nanoimprint lithography techniques including proton beam writing(PBW) and OrmoStamp mold fabrication performing on four different resists(HSQ, PMMA, SU-8 and SML) will be evaluated, and a micro channel fabrication using PBW compared with UV-lithography will be presented. The resulting chips/devices fabricated showed promising performance with high resolution and stability.
Reference:
1. K. Ziolkowska, R. Kwapiszewski, Z. Brzozka, New J. Chem. 35 (2011) 979–990. 2. Bo-bo Huang, Ming-jie Yin, A. Ping Zhang, Xue-song Ye, Sensors and Actuators A 247 (2016) 397–402 3. JaeJong Lee, Hyun-Ha Park, Kee-Bong Choi, GeeHong Kim, HyungJun Lim, Microelectronic Engineering 127 (2014) 72–76 4. F. Liu, Y. Yao, J.A. van Kan, Nuclear Instruments and Methods in Physics Research B 348 (2015) 229–232 5. S. Al-Shehri, V. Palitsin, R.P. Webb, G.W. Grime, Nuclear Instruments and Methods in Physics Research B 348 (2015) 223–228